MEMS based low cost piezoresistive microcantilever force sensor and sensor module
نویسندگان
چکیده
منابع مشابه
New Design of Mems piezoresistive pressure sensor
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ژورنال
عنوان ژورنال: Materials Science in Semiconductor Processing
سال: 2014
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2013.12.016